SPECTROSCOPY OF RADIATION-INDUCED DEFECTS IN p-TYPE Si AND SiGe ALLOYS

Gertrūda Pociūtė1, Tomas Čeponis1, Jevgenij Pavlov1

1 Institute of Photonics and Nanotechnology, Vilnius University, Saulėtekio av. 3, LT-10257, Vilnius, Lithuania

[email protected]

Radiation-induced transformations of boron dopant in p-type silicon (Si) lead to the “acceptor removal”, which degrades the performance of particle detectors [1]. The effect arises due to the transformation of substitutional lattice site boron (B\(_{s}\)) into interstitial (B\(_{i}\)) boron under irradiation. The subsequent migration of B\(_{i}\) and its interaction with interstitial oxygen impurity (O\(_{i}\)) in the Si crystal result in the formation of the interstitial boron–interstitial oxygen complex (B\(_{i}\)O\(_{i}\)), further altering the material properties. Alternative materials, such as silicon-germanium (SiGe), are being researched to mitigate these issues. SiGe alloys are promising materials for applications in photovoltaics, space technology, and high-frequency heterojunction bipolar transistors operating in the near-THz range [2]. Recent studies suggest their potential use in lithium-ion battery anodes [3] and microelectronic/optoelectronic devices, including high-speed temperature sensors, Hall-effect transducers, and γ-ray detectors [4,5]. In this work, p-type silicon (Si) and SiGe diodes with different Ge contents irradiated with 5,5 MeV electrons were studied. Capacitance deep-level transient spectroscopy (C-DLTS) and photoionization spectroscopy (PIS) were used to observe radiation-induced defects in SiGe detectors.

Figure 1
Fig. 1. The DLTS spectra of majority carrier traps in irradiated and annealed Si, Si0, 99Ge0, 01 ir Si0, 95Ge0, 05 diodes.

The DLTS spectra were measured in the 15–475 K temperature range. The spectra of the majority carrier traps were recorded at a reverse bias voltage of -5 V (U\(_{R}\)) and injection pulses of 200 ms duration (tp) at -0.1 V (U\(_{P}\)) (Fig.1). The spectra of the minority carrier traps were also investigated at reverse bias voltage (U\(_{R}\)) of -1 V and injection pulses of 200 ms duration (tp) at 2 V (U\(_{P}\)).

The results of this study, highlighting the radiation-induced defect dynamics in p-type Si and SiGe diodes with varying Ge contents and their evolution under annealing, will be presented and discussed in detail.


[1] J. Pavlov, T. Čeponis, K. Pukas, L. Makarenko, E. Gaubas, 5.5 MeV Electron Irradiation-Induced Transformation of Minority Carrier Traps in p-Type Si and Si1−xGex Alloys, Materials, 15 (2022). DOI: 10.3390/ma15051861.

[2] Y. Yang, S. Liu, X. Bian, J. Feng, Y. An, C. Yuan, Morphology- and Porosity-Tunable Synthesis of 3D Nanoporous SiGe Alloy as a High-Performance Lithium-Ion Battery Anode, ACS Nano, (2018). DOI: 10.1021/acsnano.8b00426.

[3] Yonenaga, I. Reference Module in Materials Science and Materials Engineering (Elsevier: Amsterdam, 2016).

[4] G. Kissinger, S. Pizzini, Silicon, Germanium, and Their Alloys: Growth, Defects, Impurities, and (CRC Press: Boca Raton, 2015).