Microstructures are structures where the main dimension is micro-meter scale [1]. The formation of microstructures has many technical challenges. In order to obtain the high quality microstructures, it is necessary to define and select the appropriate forming method and materials. Moreover, it is necessary to determine and use optimal production characteristics [2].
There are four main production methods: photolithography, stamping, material removal, and deposition [3]. These four production methods groups are commonly used in microstructures formation research. In addition to these, other manufacturing methods such as 3D printing or wet stamping stand out by their innovative formatting methods [4].
Materials also affect the quality of microstructures. There are four groups of materials widely used and studied in research: silicon, polymers, metals, and glass [5]. There are also various metal oxides or carbides, but they are rarely used in the production of microstructures. Silicon is the most commonly used material to make microstructures. It has semiconductor properties and good mechanical properties, which allows these materials to be used in devices such as micropumps, pressure sensors or accelerometers [6]. Polymers are dielectrics with the least mechanical strength and low melting point. Due to ongoing research, the list of various polymeric materials used in microsystems is constantly updated [7]. Metals have good mechanical properties, electrical conductivity, and high melting point. They are most commonly used for microsystem contact formation [8]. Glass stands out from other materials due to its particularly good optical properties. Glass is also characterized by high thermal and mechanical resistance [9].
However, the choice of the right material and production method does not guarantee the desired quality of the microstructure. Certain phenomena during the production of microstructures are very complex and need to be controlled and investigated. Therefore, it is necessary to develop a new adaptive technology that allow the accurate, fast and inexpensive formation of microstructures in various functional materials.