LASER MICRO-MACHINING OF TRANSPARENT MATERIAL WITH BESSEL BEAMS GENERATED BY SPATIALLY DISPLACED AXICONS

Ernestas Nacius1, 2, Benas Stanionis1, 2, Pavel Gotovski1, 3, Orestas Ulčinas1, 2, Sergej Orlov1, Vytautas Jukna1, 4

1 Center for Physical Sciences and Technology, Coherent Optics laboratory, Saulėtekio Avenue 3, Vilnius, Lithuania, 10257

2 Workshop of Photonics, Mokslininku str., 6A, Vilnius, Lithuania, 08412

3 Faculty of Electronics, Vilnius Gediminas Technical University, Naugarduko str. 41, LT-03227 Vilnius, Lithuania

4 Laser Research Center, Vilnius University, Saulėtekio Avenue 10, LT-10223 Vilnius, Lithuania

[email protected]

Bessel-Gauss beams have attracted much attention in laser micro-fabrication of transparent materials due to elongated focal zone and that is very attractive in various laser micro-machining applications where high width/depth ratio is needed. Compared to the Gaussian beam, the Bessel-Gauss beam is much more efficient in single shot micro-channel fabrication [1] or in cutting of various glasses up to a few millimeters thick [2]. Most commonly adapted Bessel-Gauss shaping element in lab is an axicon - a conical lens with sharp tip at the center. Despite the straightforwardness of axicon applicability, the element must have close to perfect shape quality, because any irregularities of its surface and especially a rounded tip greatly reduces the quality of the generated beam by inducing unwanted axial intensity modulations along the focal zone [3]. Some alternative beam shaping methods have emerged to substitute refractive axicons to increase the overall quality of the beam or create more complex patterns - from diffractive optical elements (DOEs), spatial light modulators to complex sub-wavelength metasurfaces [4, 5]. Freedom of choosing Bessel-Gauss beam generation method allows to fit in various specific beam shaping applications, thus the only limiting factors of element price or optical damage thresholds remain. Another type beam shaping element can be created by implementing birefringent nanogratings inscribed in bulk of fused silica [6]. Direct laser written nanogratings can have controllable retardance and orientation (fast axis) enabling to manufacture custom flat optical elements, usually named after geometric phase optical elements (GPOES).

In this work we use geometric phase optical elements to create custom displaced phase axicons that form modified Bessel-Gauss beams (manufactured by Workshop of Photonics). With numerical simulation and experimental work, we present practical applications of the generated beams in transparent material laser micro-fabrication. Physical phase displacement allows to create new and fanciful patterns of Bessel-Gauss beams, varying from single elongated peak to multi-peaked intensity patterns. Taking advantage of high optical damage threshold of geometric phase optical elements, we demonstrate thin glass processing with high-peak power ultra-short pulse laser.

Figure 1
Fig. 1. (a) Intensity distribution of modified Bessel-Gauss beam, produced by geometric phase optical element. Red and green lines represent intensity profiles. (b) Images by optical microscope of dependence of volume micro-crack orientation on rotation of the intensity profile of the beam, pulses with energy of 240 μJ and 4 ps duration were used.

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